Mems sensors use THE MEMS process to fabricate microhot plates on an integrated substrate using metal oxide semiconductor materials with low conductivity in clean air as gas sensitive materials. When there is detected gas in the ambient air, the conductivity of the sensor changes. The higher the concentration of the gas, the higher the conductivity of the sensor. The change in conductivity can be converted into an output signal corresponding to the concentration of the gas using a simple circuit.
Mems sensor has the advantages of small size, low power consumption, response speed block, high sensitivity, good adaptability, long life and so on